یک تشدیدگر بایاس شده سه‌بعدی: تحلیل‌های حالت پایا، فرکانس ویژه، دامنه فرکانس و کشش – کامسول

An electrostatically actuated MEMS resonator is simulated in the time and frequency domains. The device is driven by an AC + DC bias voltage applied across a parallel plate capacitor. The dependence of the resonant frequency on DC bias is assessed, and frequency domain and transient analyses are performed to investigate the device performance.