ارتعاشات ریز آینه پیش تنیده: کوپلینگ ترموویسکوز-ترموالاستیسیته – کامسول

This model analyzes the operation of a micromirror in air and the effects of thermoviscous damping on the vibration response. The model includes thermal losses in the structure as well as thermoviscous acoustic phenomena. The model couples the Thermoelasticity multiphysics interface to Thermoviscous Acoustics, Frequency Domain using the Thermoviscous-Thermoelasticty Boundary multiphysics coupling.